Cleanrooms
These are solutions for detecting and managing particles in clean rooms and the work environment within them.
To choose the right product for your needs and budget
If you need expert advice, please contact us
Products List
Wide Detector & High Performance, For small to large size (~ 300 mm) samples
Materials(Glass,CG. OCA, Films, Trays) , Surface Particles , Falling(Fallen) Particles , Process Monitoring , Silicon Wafers (Bare, Coated) , Glass, Glass Wafers , Films , Trays, Carriers , Metal Surfaces , Particle Testing (Equipment,Tray, Carrier, Magazine ) , Particle Testing (Cleanroom, Supplies) , Metallic Particle Detection , Inks, Photoresists, Waters , Process particle monitoring
SPro Series ~ 100 mm samples
Falling(Fallen) Particles , Surface Particles , Process Monitoring , Glass, Glass Wafers , Trays, Carriers , Particle Counting , Films , Particle Testing (Cleanroom, Supplies) , Particle Testing (Equipment,Tray, Carrier, Magazine ) , Metallic Particle Detection , FAB Equipment's Parts Cleanliness , Equipment's Parts Cleanliness , Inks, Photoresists, Waters , Materials(Glass,CG. OCA, Films, Trays) , Process particle monitoring
News
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2026-06-15

JEDEX Expands SEMI E195-Compliant Solution Lineup and Launches “S505 + DD Films”
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2026-06-11

Press release regarding the SEMI E195 Chamber Particle Inspection Solution.
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2026-04-30

The SEMI E195-0925 Standard published and Jedex products
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2026-03-05

Interbattery 2026
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2025-12-08

M7000 (project name: M1000R25 version) Launched.
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2025-12-04

S205 Service Discontinuation (EoS) – FAQ
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2025-12-03

S205 Service Ending on June 30, 2027 – Trade-in Program Available
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2025-10-12

ParticlePro7, M2000, and M200ESC models will be discontinued as of October 2025.
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2024-12-27

2024 SEDEX on-site interview | JEDEX
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2024-10-30

SEDEX 2024
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2024-09-26

SEDEX 2024
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2024-09-26

2024 Korea Display Exhibition
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2024-03-27

SPro3001 and SPro301 are not available for sale
Do you want more information?
Contact a professional.
We will sincerely answer all your questions and interests.
